微纳金属光学舆情布局制备技能及应用(2)

【11】Matteo Altissimo, Filippo Romanato, Lisa Vaccari et al.. X-ray lithography fabrication of a zone plate for X-ray in the range from 15 to 30 keV［J］. Microelectronic Engineering, 2002, 61-62(1-3): 173～177

【12】董亭亭,付跃刚,陈驰,张磊,马辰昊. 锗衬底外貌圆柱形仿生蛾眼抗反射微布局的研制. 光学学报, 2016, 36(5): 522004--1

增补资料

白亮, 朱京涛, 徐敬 等. 30.4 nm波优点Mg基多层膜反射镜［J］. 光学学报, 2009, 29(9): 2615～2618

【7】付杰,王晓华,李金华,方铉,魏志鹏. 硬X射线聚焦波带片的计划及建造. 光电工程, 2014, 41(3): 7-12

【26】Longyu Kuang, Chuanke Wang, Zhebin Wang et al.. Quantum-dot-array diffraction grating with single order diffraction property for soft X-ray region ［J］. Rev. Sci. Instrum., 2010, 81(7): 073508